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Scanning probe microscopy (SPM)

VEECO Dimension 3100
The Dimension 3100 Nanoman AFM from Veeco provides a variety of high resolution surface imaging techniques:

  • Atomic force microscopy, in tapping and contact modeAFM - Veeco Dimension 3100
  • Conducting atomic force microscopy (C-SFM)
  • Scanning tunneling microscopy (STM)
  • Nanoindentation software and manipulation
  • Magnetic force microscopy (MFM)
  • Electrostatic force microscopy (EFM)
  • Kelvin probe or surface potential microscopy (KPM)

The sample stage will allow large samples sizes (up to a 6-inch wafer) with a scan size up to 90µm in the X & Y and 6µm in the Z.

VEECO Multimode
AFM - Veeco Multimode (Zoom out)

  • Contact mode (air/liquid)
  • Tapping mode (air/liquid)
  • Heating controller. Measurements in the temperature range of ambient to 250ºC
  • Scan size up to 12µm in the X-Y plain, and a Z range up to 5µm
  • Samples up to 15mm in diameter having a maximum thickness of 6mm.